FIELD: engineering of microscopes.
SUBSTANCE: probes for probe microscopy are made of silicic whiskers, grown in accordance to steam-liquid-crystal mechanism on cantilevers with crystallographic orientation 111. Such cantilevers are made of silicon-on-insulator structures, which are formed by melting together silicon plates, while one of plates has orientation 111. Whiskers grown in accordance to aforementioned method, may have stepped shape, ideal for probes.
EFFECT: high resolution capacity with high anti-vibration stability.
4 cl, 4 ex, 17 dwg
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