MONOCRYSTALLINE METAL PROBE FOR SCANNING DEVICES Russian patent published in 2017 - IPC G01Q70/08 B82Y35/00 

Abstract RU 2610040 C1

FIELD: physics.

SUBSTANCE: invention relates to formation of scanning microscopes probes and their structures, namely to cantilevers consisting of a console and a needle. The probe for scanning devices contains a cantilever on a massive holder and a monolithic cantilever nib, located on the free part of the cantilever. The cantilever is made of a single crystal metal layer and the nib is epitaxial relatively to this level.

EFFECT: invention provides conductivity while improving resolution and increasing the reliability of the probe.

5 cl, 1 dwg

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RU 2 610 040 C1

Authors

Givargizov Mikhail Evgenevich

Dates

2017-02-07Published

2015-11-13Filed