PROCESS OF FORMATION OF SENSOR ELEMENT OF SCANNING SOUNDING MICROSCOPE Russian patent published in 2003 - IPC

FIELD: microscopy. SUBSTANCE: process of formation of sensor element of scanning sounding microscope consists in application of initial material on sonde of silicon cantilever, in formation of focused electron beam in close proximity to zone of start of formation of growth of sensor element and in control over growth of point by movement of sonde relative to focus of electron beam. Surface of cantilever is modified by imparting it with specified values of wettability and roughness prior to start of formation of sensor element, material of controlled composition is deposited from steam environment and positive charge on surface of sensor element is adjusted by means of additional electron beam. EFFECT: precise reproduction of geometry and composition of sensor element. 5 cl, 6 dwg