THERMO-ANEMOMETER INDICATOR OF MASS FLOW OF LIQUIDS AND GASES Russian patent published in 2006 - IPC G01F1/692 

FIELD: microelectronic and micromechanical engineering.

SUBSTANCE: indicator has silicon frame - base with membrane, made of alternating layers of dioxide and silicon nitride with given relation of layer thicknesses. On the membrane, heating resistor and two platinum resistor are positioned, one of which is sensitive element of indicator, and another one is utilized for temperature correction. On the base-frame a platinum resistor is positioned for temperature compensation of stationary mode. Heating resistor is made for sensitive element and isolated from it by layer of Al₂O₃ or diamond-like film. In special case of realization in membrane along whole length through slits are made more than 1 micrometer wide to decrease thermal connection between resistors. Total thickness of membrane does not exceed 2 micrometers.

EFFECT: substantial (at least in ten times) decrease of energy consumption, optimal mechanical durability and temperature resistance.

2 cl, 3 dwg