FIELD: measurement equipment.
SUBSTANCE: primary converter of fluid media flow rate is arranged in the form of a silicon crystal, which comprises a silicon base frame, a dielectric membrane on the base frame, a heating and a sensitive platinum resistors on the membrane surface. At the same time the base frame is made of silicon of n-type of conductivity, and the heating resistor is made of silicon of p-type of conductivity and is arranged under the membrane on its plane.
EFFECT: high reliability and durability, provision of the possibility to integrate a sensor with control circuits in one crystal.
4 dwg
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