FIELD: computer science and integral electronics, in particular - engineering of VLSI integral logical elements.
SUBSTANCE: integral logical element contains semi-insulated GaAs substrate, first input metallic bus, first AlGaAs area of second conductivity type, positioned above aforementioned bus and forming Schottky transition together with it, below it first AlGaAs area of native conductivity spacer is positioned, below it, first GaAs area of native conductivity channel is positioned, second AlGaAs area of second conductivity type, second AlGaAs area of native conductivity spacer, second input metallic bus, output area of second conductivity type, output metallic bus, zero potential metallic bus, metallic power bus, areas of separating dielectric. Integral logical element additionally contains AlGaAs area of native conductivity tunnel barrier, InGaAs area of native conductivity channel, AlGaAs area of second conductivity barrier, zero potential area of second conductivity type with transverse cross-section in form of symbol L, while first GaAs area of native conductivity channel and InGaAs area of native conductivity channel have vertical mutual position and are divided by AlGaAs area of native conductivity tunnel barrier, output area of second conductivity type is L-shaped and has L-shaped cross-section.
EFFECT: decreased efficiency of crystal area usage, increased speed of operation and decreased energy consumed by switching integral logical element.
3 dwg
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Authors
Dates
2006-06-27—Published
2004-12-15—Filed