FIELD: manufacture of articles with protection coatings in different branches of industry, plasma technique of applying coatings such as injection system for injecting fluidic reagent to plasma flow, apparatuses and methods for applying coatings onto substrate.
SUBSTANCE: injector includes first portion 6 of duct 2 restricting flow of fluidic reagent and having such contour that inner walls of first portion of duct are parallel to first axis 9. Injector also includes second portion 8 of duct providing possibility for supplying fluidic reagent to first portion of duct. Second portion 8 of duct has such recess that inner walls of second portion diverge from first axis 9 by predetermined angle. Injector may include in addition mouthpiece protruding into plasma. Injector may be used in injection system with possibility of dismounting it out of base for working in plasma deposition system.
EFFECT: uniform distribution of fluidic reagent, lowered risk of clogging ducts at long-time usage of injector.
46 cl, 9 dwg
