INSTALLATION FOR PLASMA SEDIMENTATION AND PROCEDURE FOR MANUFACTURE OF SOLAR CELLS Russian patent published in 2011 - IPC C23C16/507 H01L31/18 

FIELD: machine building.

SUBSTANCE: installation consists of container with lengthwise axis for bearing at least one substrate, of at least two modules each having at least one plasma burner for sedimentation of layer of reaction product on at least one substrate, of at least one plasma burner set at distance from at least one substrate, of chamber encasing conveyer and at least two modules and of a system for exhaust of spent gases. According to another version the installation consists of a device for support of the substrate, of a device for supply of reagents, of a device of a plasma burner for sedimentation of product on the substrate, of device of the plasma burner set at distance from the substrate and of a device for fluctuation of the device of the plasma burner relative to the substrate.

EFFECT: improvement of installation.

67 cl, 8 dwg