INTEGRAL MICRO-MECHANICAL GYROSCOPE-ACCELEROMETER Russian patent published in 2007 - IPC G01P15/14 G01C19/56 

FIELD: micro-system equipment; measuring technique.

SUBSTANCE: gyroscope-accelerometer can be used for measuring angular speed and acceleration. Gyroscope-accelerometer has semiconductor substrate 1. There are 33 motionless electrodes 2-34 disposed onto it, eight supports 35-42 disposed directly on substrate, resilient ring 43 disposed directly on substrate to form capacitor with motionless electrodes 2-33. Ring is connected with supports by means of twenty four elastic beams 44-67; ring is mounted to have gap relatively substrate. Eight elastic beams 52-59 are made in form of "L", eight elastic beams 60-67 are made in form of arch. Device also has inertial weight 68 disposed to have gap in relation to substrate; weight 68 forms flat capacitor with motionless electrode 34. Inertial weight 68 is connected with supports 35, 37, 39 and 41 by means of elastic beams 69-72. Motionless electrodes, elastic ring and elastic beams are made of semiconductor material Values of angular speed and acceleration can be measured along Z axis disposed in perpendicular to surface of substrate.

EFFECT: improved precision of measurement; improved reliability of results of measurement.

2 dwg