INTEGRATED MICROMECHANICAL GYROSCOPE-ACCELEROMETER Russian patent published in 2020 - IPC G01P15/08 

FIELD: measuring equipment.

SUBSTANCE: invention relates to measurement equipment and microsystem equipment. Essence of the invention consists in that the integrated micromechanical gyroscope-accelerometer additionally comprises four fixed electrodes of capacitive displacement transducers, four fixed electrodes of electrostatic drives, eight additional supports, eight additional U-shaped systems of elastic beams, wherein four movable electrodes of capacitive displacement transducers are made in form of T-shaped plates with perforation with comb structures on three sides, connected to inertial mass by means of E-shaped systems of elastic beams, made from semiconductor material and located with a gap relative to semiconductor substrate, four fixed electrodes of capacitive displacement transducers are combined in pairs, and inertial mass is made with perforation and consists of two parts: internal and external, connected by two torsion bars.

EFFECT: possibility of measuring values of angular velocity and linear acceleration along axes Z directed perpendicular to plane of substrate of gyroscope-accelerometer, and X, Y located in plane of device substrate.

1 cl, 2 dwg