INTEGRAL MICRO MECHANICAL GYROSCOPE-ACCELEROMETER Russian patent published in 2019 - IPC G01P15/00 

FIELD: measuring equipment.

SUBSTANCE: invention relates to the angular velocity and linear acceleration integral measuring elements. Essence of the invention lies in the fact that the integrated micromechanical gyro accelerometer additionally contains the displacement capacitive transducers eight additional fixed electrodes, capacitive displacement transducers six additional moving electrodes, the electrostatic drives two moving electrodes, electrostatic drives eight stationary electrodes, twelve additional supports, the elastic beams sixteen U-shaped systems, the elastic beams four L-shaped systems, made of semiconductor material and located with a gap relative to the semiconductor substrate additional inertial mass.

EFFECT: measurement of linear acceleration along the X and Y axes, which are mutually perpendicular in the substrate plane, and the Z axis, directed perpendicular to the substrate plane, and the angular velocity along the X axis, located in the substrate plane, and Z axis, perpendicular to the substrate plane.

1 cl, 2 dwg