INTEGRAL MICRO MECHANICAL GYROSCOPE ACCELEROMETER Russian patent published in 2016 - IPC G01P15/08 

FIELD: measuring equipment.

SUBSTANCE: invention relates to measuring equipment and microsystems. Subject of invention is that device additionally includes four additional fixed electrode of capacitance transducers of displacement, in form of plates with comb structures, made of semiconductor material on one side, and located directly on semiconductor substrate so, that they form capacitor with movable electrodes of capacitance transducers of displacement in plane of their plates through side gaps and interpenetrating each other comb electrodes, four additional fixed electrodes of electrostatic actuators, in form of plates with comb structures, made of semiconductor material on one side, and located directly on semiconductor substrate so, that they form capacitors with movable electrodes of capacitance transducers of displacement in plane of their plates through side gaps and interpenetrating each other comb electrodes, eight additional supports, made of semiconductor material and located directly on semiconductor substrate, eight additional U-like systems of elastic beams, made of semiconductor material and arranged with gap relative to semiconductor substrate, wherein four movable electrodes of capacitance transducers of displacement are composed of T-shaped perforated plates with comb structures at three sides, four fixed electrodes of capacitance transducers of displacement are combined into one, and inertial mass is made with perforation.

EFFECT: technical result is possibility of measuring angular velocity and linear acceleration along axis Z, directed perpendicular to plane of substrate of gyroscope accelerometer, and axes X, Y, located in plane of substrate of device.

1 cl, 2 dwg