FIELD: technological processes; physics.
SUBSTANCE: device contains semi-conductor base with five fixed electrodes, four movable electrodes that are made in the form of plates with comb structures that form condensers with fixed electrodes and that are connected with base by means of elastic beams that are made on the basis of carbon nanotubes, inertial mass, which is installed with clearance in relation to base and with a layer of additional inertial mass applied on it.
EFFECT: increase of measurement accuracy.
2 dwg
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