FIELD: electricity.
SUBSTANCE: invention may be used mainly in straight-line vacuum arc sources of cathode plasma with microscopic particles filtration in the set with different vacuum arc evaporators and plasma conduit for plasma transportation. The anode pack comprises the anode covered by a focusing electromagnetic coil made as a pipe section. Inside the anode a deflecting electromagnetic coil is placed coaxially to it in the electroconductive housing, at that its magnet field is directed towards the focusing electromagnetic coil. Inside the deflecting coil, at the axis close to its butt end faced to input opening of the anode there is a permanent deflecting magnet, which magnet field is codirectional to the magnet field of deflecting electromagnetic coil. The anode pack is distinctive in that it includes an additional permanent magnet, which is placed inside the permanent deflecting magnet at the axis close to its butt end faced to the side opposite to input opening of the anode, and magnet field of this additional permanent magnet is opposed to the magnet field of the permanent deflecting magnet. At that positive pole of the supply source is connected electrically both to anode through winding of the focusing electromagnetic coil and to the housing of the deflecting coil through its winding.
EFFECT: ensuring dynamic balance of plasma fluxes moving in the gap between inner surface of the anode and outer surface in the housing of the deviating electromagnetic coil thus reducing plasma losses significantly.
2 cl, 1 dwg
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Authors
Dates
2015-01-27—Published
2012-04-11—Filed