FIELD: powder metallurgy.
SUBSTANCE: invention is directed to filters for high-efficiency cleaning of process gases polluted with disperse micropollutants in microelectronics, medicine, biotechnology, and food industry. Gas-impermeable blank is formed from metal powder and sintered. Selective layer is then formed on the surface of gas-impermeable blank using alternating deposition and sintering operations. High-efficiency selective layer is with average pore size ≤ 1 μm is formed with the aid of vertically moving die and receiving cone-shaped device symmetrically disposed in higher portion of die, which is filled with paste consisting of powder and binding additive. Finished products are characterized by high ability of trapping particles having diameter at least 0.01 μm, low specific resistance to gas flow, and high quality factor.
EFFECT: improved performance characteristics.
4 cl, 2 dwg, 1 tbl
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