SENSITIVE ELEMENT ON SURFACE ACOUSTIC WAVES FOR MEASURING PRESSURE OF LIQUIDS AND GASES Russian patent published in 2018 - IPC G01L9/08 

FIELD: measuring equipment.

SUBSTANCE: invention relates to the field of measuring technology for measuring the pressure of liquid and gaseous atmosphere. Sensitive element on the surface acoustic waves (SAW) for pressure measurement contains a piezo plate, on the surface of which the delay lines (DL) forming SAW structures are formed, including the interdigitated converter (IDC) located on the acoustic path. On the reverse side of the piezo plate is a notch that covers the acoustic path along the aperture. DL contains at least two reflecting structures (RS) consisting of reflector arrays, and on the back side of the piezo plate with respect to the surface with the SAW structures, at least one additional notch displaced relative to the central axis of the acoustic path is formed.

EFFECT: increasing sensitivity of the device to small changes in pressure.

3 cl, 7 dwg