METHOD OF MAKING THIN FILM HIGH TEMPERATURE SUPERCONDUCTING CIRCUITS Russian patent published in 2008 - IPC H01L39/24 

FIELD: electronics.

SUBSTANCE: invention pertains to cryoelectronics and can be used in making high temperature superconducting circuits. In the method of making high temperature superconducting schemata after depositing a buffer sub-layer and high temperature superconducting films, the positively charged surface of the schematic is treated with negative spark pulses with parameters τ=25-35 ns, λ=1-1.2 kHz, E=25-30 kV/cm and power P=2πλRT_Rexp(fR²/2α), where R is the thickness of the film and the sub-layer; T_R is the temperature of forming superconductivity; λ, α - heat conductivity, heat diffusivity of the material.

EFFECT: higher quality of the high temperature superconducting schemata, their critical parameters through treatment of the positively charged surface of the schemata by negative spark pulses.

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