METHOD OF MAKING MULTILAYER SUPERCONDUCTING yBaCuO NANOFILMS ON SUBSTRATE Russian patent published in 2010 - IPC H01L39/24 B82B3/00 

FIELD: physics; semiconductors.

SUBSTANCE: invention relates to cryogenic engineering, particularly to a method of making multilayer superconducting nanofilms. In the method of making multilayer supeconducting YBaCuO nanofilms on a substrate using a laser ablation technique, based on making an intermediate layer between the substrate and the formed superconducting nanofilm, where the intermediate layer does not have superconducting properties and is made from high-temperature superconducting material of the same composition, the intermediate layer is made through laser sputtering a target made from YBa₂Cu₃O₇ onto a substrate which is heated to temperature of formation of liquid phase of the YBa₂Cu₃O₅ material. Sputtering is done until formation of a polished non-superconducting layer of YBa₂Cu₃O₅ of given thickness. The substrate with the polished layer is then cooled to optimum temperature of formation of a high-temperature superconducting nanofilm of YBa₂Cu₃O₇ and the YBa₂Cu₃O₇ high-temperature superconducting nanofilm of given thickness is sputtered through laser sputtering of the same target at the same pressure in a chamber with subsequent cooling of the obtained three-layered structure to room temperature.

EFFECT: obtaining multilayer superconducting nanofilms with high degree of polishing and uniformity of structure on a substrate with provision for good high-temperature superconducting parameters and absence of mechanical stress between the intermediate and top superconducting layers of the film, which allows for repeated thermal cycling and longer operation of devices based on the said films.

3 cl, 3 dwg