METHOD OF CONTACT RESISTANCE MEASURMENT Russian patent published in 2008 - IPC G01R27/00 

FIELD: electricity; physics.

SUBSTANCE: through the conductive explorer of atomic-force microscope, which is pressed with constant force to the test specimen surface, it is passed electric current. Mean quantity of electric current is maintained constantly, by means of changes of constant component of a stress, imposed between probe and pattern. Also between probe and pattern it is imposed alternating voltage and it is measured constant voltage component, required for keeping predetermined value of average current and amplitude of current variable component, passing through the probe. Contact impedance is calculated as ratio of constant voltage component to average current value and differential contact resistance is calculated as ratio of voltage variable component to amplitude of current variable component.

EFFECT: invention provides simultaneous measurement method of contact impedance and differential contact resistance at current reference.

4 cl, 1 dwg