PROCESS OF COLLECTION AND PROCESSING OF INFORMATION ABOUT SURFACES OF SAMPLE Russian patent published in 2000 - IPC

FIELD: measurement technology. SUBSTANCE: proposed process consists in sequential taking of at least section of power curve in preset points of surface and in its use for determination of parameters of sample with subsequent making of corresponding spatial distributions. Reference points are chosen on power curve and values of deviation power of cantilever and/or coordinates of its fixed end and/or derivatives from deviation force of cantilever by coordinate of its fixed end are registered in these points as minimum. Parameters of sample characterizing relief and/or properties of sample surface and/or number and properties of its surface layers are determined by number of reference points and/or by mentioned registered values. Coordinates of sample surface and/or boundaries of surface layers or thicknesses of surface layers or adhesive force of surface sample and/or surface layers or coefficient of elasticity of sample surface and/or surface layers are determined. EFFECT: expanded functional capabilities of process, enhanced accuracy and improved authenticity of obtained information, increased productivity and informativity. 29 cl, 19 dwg