CALIBRATING MASTER FOR PROFILOMETRES AND SCANNING PROBE MICROSCOPES Russian patent published in 2010 - IPC G02B21/00 

FIELD: physics.

SUBSTANCE: invention may be used to calibrate profilometres and scanning probe microscopes. Master makes it possible to perform calibration both before process of measurement and directly in process of measurements, when a sample installed into profilometre or scanning probe microscope is being examined. In available calibrating master for profilometres and scanning probe microscopes, which comprises plate, and plate is made of polarised piezoelectric material, and an electrode is attached to both opposite sides of plate, and electrodes are connected to source of electric voltage having constant amplitude and polarity.

EFFECT: invention makes it possible to develop calibrating master resistant to process of master surface abrasion, degradation, oxidation and contamination, resistant to multiple cleaning of surface and to spread area of master application over subnanometre range of measurements.

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