FIELD: measurement technology. SUBSTANCE: method includes usage of magnetosensitive conducting sonde. During first scanning oscillations of sonde are excited on first frequency, sonde is brought to surface of specimen till amplitude of its oscillations reaches preset value, amplitude of oscillations of sonde is maintained by feedback system by way of relative vertical positioning of sonde and surface of specimen. Signal of relative vertical positioning is recorded in scanning point. Then oscillatory mechanical action on sonde is stopped and second scanning is carried out. Excitations are excited in this case by application of potential difference including time constant and variable components to sonde. Constant component should have such value which will minimize amplitude of oscillations on first harmonic of second frequency and this value is recorded. Second scanning is conducted with use of recorded signal of relative vertical positioning. Later additional scanning is carried out with use of recorded signal of relative vertical positioning and at same time constant component of potential difference of value memorized in previous scanning is applied and variable component of potential difference is set equal to zero to secure compensation for surface electric potential. After this deviation of sonde in these scanning points is recorded with obtainment of characteristics of magnetic field. EFFECT: elimination of influence of phase inhomogeneity of surface, increased measurement accuracy. 5 cl, 2 dwg
Title | Year | Author | Number |
---|---|---|---|
PROBE-TYPE SCANNING MICROSCOPE AND TECHNIQUE FOR MEASURING SURFACE PROPERTIES BY THIS MICROSCOPE | 1996 |
|
RU2109369C1 |
DETECTION SYSTEM FOR DYNAMIC PROBE | 2009 |
|
RU2518859C2 |
MULTIPROBE CANTILEVER FOR SCANNING PROBE MICROSCOPE | 1996 |
|
RU2124251C1 |
SYSTEM OF DETECTION OF PROBE | 2009 |
|
RU2512674C2 |
GEAR MEASURING MECHANICAL CHARACTERISTICS OF MATERIALS | 1996 |
|
RU2108561C1 |
SCANNING PROBING MICROSCOPE | 2003 |
|
RU2334214C2 |
CANTILEVER FOR SCANNING PROBE MICROSCOPE | 1996 |
|
RU2124780C1 |
PROBE FOR NUCLEAR POWER MICROSCOPE | 2004 |
|
RU2356110C2 |
PROCESS OF COLLECTION AND PROCESSING OF INFORMATION ABOUT SURFACES OF SAMPLE | 1999 |
|
RU2145055C1 |
TEST STRUCTURE FOR DETERMINATION OF FORM AND GEOMETRICAL DIMENSIONS OF NEEDLE OF SCANNING PROVING MICROSCOPE | 1997 |
|
RU2121130C1 |
Authors
Dates
2002-11-27—Published
2000-12-14—Filed