FIELD: physics; measurement.
SUBSTANCE: optical tester for control object surface displacements contains optically connected series coherent optical source, optical system, beam splitter and reflector. Besides optical tester contains photodetector for optical field intensity recording within preset interference pattern region and control object surface displacement converter based on measurement of optical field intensity within preset interference pattern region and logging. Control object is followed the optical system focusing radiation to its surface in the form of flashing point. Beam splitter, reflector and photodetector are rigidly fixed on common foundation equipped with moving mechanism providing increasing of space between control object surface and external surface of beam splitter, if range of measured displacements is increased, and providing reducing of space between control object surface and external surface of beam splitter is reduced, if range of measured displacements is reduced.
EFFECT: higher performance of optical testers for control object surface displacements due to higher range of measured displacement values.
2 dwg
Title | Year | Author | Number |
---|---|---|---|
OPTICAL INTERFERENTIAL DEVICE FOR MEASUREMENT OF MOVEMENTS OF SURFACES OF CONTROLLED OBJECTS | 2012 |
|
RU2512697C1 |
DISPLACEMENT METER WITH VOLUME HOLOGRAM | 1999 |
|
RU2169348C1 |
TERAHERTZ PLASMON FOURIER SPECTROMETER | 2011 |
|
RU2477842C1 |
INTERFERENTIAL METRE OF FINE MOVEMENTS | 2009 |
|
RU2410642C1 |
METHOD OF MEASURING LINEAR AND ANGULAR DISPLACEMENTS | 2008 |
|
RU2388994C1 |
METHOD OF MEASURING LINEAR AND ANGULAR COMPONENTS OF SMALL MOVEMENTS OF SURFACES OF CONTROLLED OBJECTS | 2015 |
|
RU2606245C1 |
NANO- AND SUB-NANOMETER ACCURACY APPARATUS FOR CONTROLLING POSITION OF OBJECT | 2012 |
|
RU2502951C1 |
OPTICAL DEVICE FOR MEASURING DISPLACEMENTS | 2009 |
|
RU2407988C2 |
OPTICAL DEVICE FOR MEASURING DISPLACEMENTS | 2007 |
|
RU2373492C2 |
METHOD OF DETERMINING PHASE PROGRESSION OF MONOCHROMATIC SURFACE ELECTROMAGNETIC WAVE IN INFRARED RANGE | 2012 |
|
RU2491522C1 |
Authors
Dates
2009-01-10—Published
2007-03-26—Filed