ACCELEROMETER USING SUPERFICIAL ULTRASONIC WAVES WITH RESONATOR Russian patent published in 2009 - IPC G01P15/09 

FIELD: physics, measuring.

SUBSTANCE: invention concerns field of measuring technics and can be used in instrument making and mechanical engineering for acceleration measuring. The accelerometer contains a piezoelectric-crystal plate on which the resonator on the superficial ultrasonic waves is generated, and the inertial masses anchored on the most distant piezoelectric-crystal plate legs. Reflecting structures of the resonator are located with the continuance equal , the furrow breadth is equal , porosity is more 1, λ length of the superficial ultrasonic wave, n - an integer, more or equal 1, m - an integer, more or equal 1. The fastening field of the piezoelectric-crystal plate to the basis is located on opposite (in relation to a surface of distribution of ultrasonic waves) surfaces of the piezoelectric-crystal plate both under the interdigitated transducer transformer and between the reflecting structures forming the uniform measuring resonator on the superficial ultrasonic waves. The piezoelectric-crystal plate can have a variable thickness, and inertial masses can be rigidly related among themselves, forming the uniform inertial mass anchored on the most distant legs of the piezoelectric-crystal plate.

EFFECT: pinch of accuracy and sensitivity of acceleration measuring.

4 cl, 1 dwg