FIELD: physics.
SUBSTANCE: detecting element for measuring physical quantities consists of piezoelectric plates, on whose surface there is at least one interdigital transducer and not less than two reflecting structures lying on two sides of the interdigital transducer and made in form of a system of grooves on the surface of the piezoelectric plates with varying period. The interdigital transducers and reflecting structures lie at different angles to the primary flat line of the piezoelectric plates. The interdigital transducers are arranged in such a way that excitation of surface acoustic waves takes place in the direction of the maximum electromechanical coupling factor. Reflecting surfaces lie on two sides of the interdigital transducers in directions with the highest sensitivity to change in the measured physical quantity.
EFFECT: high sensitivity of the detecting element to changes in the measured physical quantity.
1 dwg
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Authors
Dates
2011-05-10—Published
2009-12-14—Filed