FIELD: physics.
SUBSTANCE: invention can be applied in instrument production and engineering for measurement of deformation, as well as concentrated forces and gas and fluid pressure. The resonator includes piezoelectric plate with interdigital transducer and equidistant reflector structures in the form of a groove system on the plate surface. The reflector structures are located at both ends around the interdigital transducer and perpendicular to the propagation direction of surface acoustic waves. Grooves of the reflector structures are set periodically at pace of groove width is porosity over 1, λ is a length of surface acoustic wave, n is an integer not less than 1, m is an integer not less than 1. Interdigital transducer is non-equidistant.
EFFECT: improved precision of deformation measurement due to higher resonator frequency deviation.
3 cl, 2 dwg
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Authors
Dates
2008-08-20—Published
2006-10-17—Filed