MECHANICAL OSCILLATOR AND METHOD OF ITS MANUFACTURING Russian patent published in 2009 - IPC G12B21/00 

FIELD: physics.

SUBSTANCE: invention relates to mechanical oscillator which determined cantilever index point on the first line of bottom and can determine cantilever length without dependence on accuracy of alignment and quantity of etching, and the method of mechanical oscillator manufacturing. The mechanical oscillator, gained by means of plate processing, contains bottom generated from substrate, supporting the SOI plate, and structure, being cantilever which is executed from silicon thin film of the SOI plate and it is horizontally telescoped from the bottom. The part of profound oxide-coated film between the bottom and the structure which is cantilever is removed, and the cantilever, beginning from bottom first line, is shaped by means of direct linking of the structure being cantilever, with part, including, at least, first line of the bottom where the profound oxide-coated film is removed.

EFFECT: increase of operational performances of device.

34 cl, 32 dwg