FIELD: design of a probe for scanning probe microscope.
SUBSTANCE: invention provides a probe for scanning probe microscope and method for manufacturing the probe, which allow to perform precise measurements without contact between base of cantilever and measured object and without concealing the object with the base of the probe. The probe for scanning probe microscope includes base, supporting cantilever which starts horizontally at the base, where the upper end of the supporting cantilever is processed in such a way, that inclined surface is available which does not prevent optical observation of measuring cantilever, and the measuring cantilever, provided on the upper end of the supporting cantilever and having length which is less than or equal to 20 microns and thickness which is less than or equal to 1 micron.
EFFECT: increased efficiency.
2 cl, 25 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| PROBE FOR THE PROBE MICROSCOPE WHICH USES TRANSPARENT SUBSTRATES, THE PROBE MICROSCOPE AND THE METHOD FOR MANUFACTURING THE PROBE | 2004 |
|
RU2321084C2 |
| THREE-DIMENSIONAL STRUCTURE FORMED BY THIN SILICON WIRES, METHOD OF PRODUCTION OF THE STRUCTURE AND DEVICE ON BASE OF IT | 2003 |
|
RU2320976C2 |
| MONOCRYSTALLINE METAL PROBE FOR SCANNING DEVICES | 2015 |
|
RU2610040C1 |
| CANTILEVER WITH WHISKER PROBE AND METHOD FOR MANUFACTURING SAME | 1999 |
|
RU2275591C2 |
| PROCESS OF FORMATION OF CANTILEVER OF SCANNING PROBING MICROSCOPE | 1997 |
|
RU2121657C1 |
| METHOD OF MAKING SPM NANOSENSORS THROUGH ELECTRONIC STIMULATION | 2009 |
|
RU2402022C1 |
| METHOD FOR PRODUCING OF CABTILEVER OF SCANNING PROBE MICROSCOPE | 2007 |
|
RU2335033C1 |
| POINT STRUCTURES, DEVICES BUILT AROUND THEM, AND THEIR MANUFACTURING METHODS | 2000 |
|
RU2240623C2 |
| PROBE FOR SCANNING PROBE MICROSCOPY AND METHOD OF ITS MANUFACTURING (EMBODIMENTS) | 2017 |
|
RU2660418C1 |
| SYSTEM OF DETECTION OF PROBE | 2009 |
|
RU2512674C2 |
