POLISHING SUSPENSION AND METHOD OF CERAMIC PART POLISHING Russian patent published in 2009 - IPC C09G1/02 C09K3/14 H01L21/321 

Abstract RU 2354675 C1

FIELD: construction.

SUBSTANCE: polishing suspension includes fluid medium and abrasive material in the form of particles, including soft abrasive particles, hard abrasive particles and colloid particles of silicon dioxide. Hardness of soft abrasive particles in Mohs scale is not more than 8, hardness of hard abrasive particles in Mohs scale is not less than 8, weight ration soft to hard abrasive particles is not less than 2:1, and suspension is partially flocculated and includes agglomerates with soft abrasive particles, hard abrasive particles and colloid particles of silicon dioxide. Also invention claims method of ceramic part polishing using claimed suspension.

EFFECT: high speed and enhanced quality of polishing.

17 cl, 1 tbl, 4 dwg

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RU 2 354 675 C1

Authors

Lakonto Ronald V.

Khehrle Ehndrju G.

Dates

2009-05-10Published

2006-09-29Filed