FIELD: instrument engineering.
SUBSTANCE: invention refers to measurement instruments. Method consists in sending of ultrasonic laser pulse with width Δtl = 20-100 femtoseconds to the tested object in which repeated tested process is simultaneously excited (for instance, semiconductor glow in integrated circuit or ferroelectric polarisation is excited by electric field). The width of tested process Δttp is more than laser pulse width (Δttp>Δtl) and less than laser reverse repetition frequency fl(Δttp<Δ1/fl), where fl can go to infinity. It means that pulse can be single. Note that, laser pulse scans exciting pulse by optical delay line.
EFFECT: significant increase of diagnostic method time resolution that is equal to the width of applied laser pulse Δtl.
3 cl, 3 dwg
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