FIELD: instrument engineering.
SUBSTANCE: gas sensor parametre improving method consists in subsequent formation on insulating substrate of sensory layer based on stannic oxide, interdigital contacts to the film, heater, and contact areas to sensory layer and heater. After sensing element of the sensor has been formed, its surface is irradiated with violet light-emitting diode with wave of about 400 nm long and power of not less than 76 mW with the purpose of decreasing operating temperature and power consumption of the sensor.
EFFECT: improving gas sensor parametres.
3 dwg
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