FIELD: instrument engineering.
SUBSTANCE: sensors are meant to be operated in severe physical or chemical environments. Sensor based on wave acoustic device consists of at least one piezoelectric plate with two opposite sides on one of which there is a sensitive area as well as coating applied to sensitive area; at that, coating includes the following: the first electrode located in sensitive area; insulating layer located above the first electrode; at that, insulating layer contains at least one metal of the group consisting of tantalum, niobium, vanadium, molybdenum, or combination thereof, and abrasion-resistant layer located above the insulating layer and containing diamond-type carbon.
EFFECT: providing the possibility of continuous sensor operation in wide range of chemical, temperature and mechanical severe environments.
15 cl, 2 dwg
