APPLICATION OF A COATING WITH DIAMOND-LIKE CARBON BY THE MAGNETRONIC PECVD METHOD Russian patent published in 2021 - IPC C23C14/22 C23C14/06 C23C14/12 C23C14/16 C23C14/35 C23C16/513 

FIELD: chemistry.

SUBSTANCE: invention relates to a method for coating a substrate (1) with a layer of diamond-like carbon (DLC) by the PECVD method. Plasma is created by means of a magnetron target (magnetron PECVD) in a vacuum chamber (3), in which a magnetron (10) equipped with a target (9) and a substrate (1) are placed. At least one reagent gas is introduced into the plasma created by the magnetron target (9) in a vacuum chamber, as a result of which fragments of the reagent gas are formed, which are deposited on the substrate (1) with the formation of a DLC layer.

EFFECT: technical result of the invention is that it is possible to apply a DLC layer on substrates (1) of a large size, for example, such as glass panels, without heating the substrate. The resulting DLC layers are of excellent quality in terms of scratch resistance and optical performance, and can be used with conventional deposition devices.

12 cl, 4 dwg, 2 tbl