METHOD AND DEVICE FOR SURFACE MODIFICATION Russian patent published in 2012 - IPC H01J37/32 C23C14/22 

Abstract RU 2470407 C2

FIELD: process engineering.

SUBSTANCE: invention relates to application of diamond-like 20-1500 nm-thick carbon coating on bits, mills, blades, etc. Proposed method comprises the steps that follow. i) Making substrate containing material with affinity with carbon. ii) Cleaning substrate surface. iii) Depositing metal-bearing layer on the surface. iv) Ion bombardment of coated surface. v) Depositing carbon layer on the surface. Proposed device has several reaction chambers arranged in a row for cartridge with material to be processed to be transferred there through. Besides, this invention relates to coating with diamond-like layer applied on substrate including titanium layer. Note here that carbon layer and titanium layer partially cover each other. Note also that carbon layer features gradient of carbon atom concentration of 0 to 100%.

EFFECT: higher efficiency and hardness.

33 cl, 5 dwg

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RU 2 470 407 C2

Authors

Chizik Anna Andreevna

Mikhajlov Aleksej Sergeevich

Dates

2012-12-20Published

2007-08-03Filed