METHOD OF CARBONACEOUS MATERIAL RECEIVING, CONSISTING METAL Russian patent published in 2009 - IPC C23C26/00 C23C14/06 C23C14/32 B82B3/00 

FIELD: nanotechnology.

SUBSTANCE: invention relates to nanotechnology and nanostructures, particularly carbon-base materials and can be used in different field of engineering and energetics. In vacuum on substrate made of dielectric material it is sediment evaporated in vacuum silver by means of plasma carbon-base material. Silver sedimentation is implemented before the sedimentation of carbon-base material. Evaporation of carbon-base material, in the capacity of which it is used graphite, is implemented by pulsed arc discharge. Plasma for sedimentation of carbon-base material is created outside the discharge gap area of voltaic arc in the form of compensated currentless for-coagulates of carbonaceous plasma with density 5-10¹²-1·10¹³ cm^-3, duration 200-600 mcs, recurrence rate 1-5 Hz. During the sedimentation process of carbon-base material it is implemented stimulating effect of carbonaceous plasma by inert gas in the form of ion flow with energy 150-2000 eV, which is directed perpendicularly to carbonaceous plasma stream. Then substrate with sediment on it silver and carbon-base material is extracted from vacuum chamber and annealed on air at temperature 400°C during 10 minutes.

EFFECT: it is manufactured carbon-base material, containing metal, with new properties, for instance electrical conductance and transparency.

11 dwg