PRODUCTION METHOD OF METAL-CONTAINING CARBON NANOMATERIAL Russian patent published in 2013 - IPC C23C14/24 C23C14/16 B82B3/00 

FIELD: metallurgy.

SUBSTANCE: method involves subsequent vacuum deposition of metal and graphite on a substrate. Metal is deposited by thermal evaporation, and graphite is deposited by evaporation with a pulse arc discharge and deposition by means of compensated non-current foreclusters of carbon plasma with density of 5·10¹²-1·10¹³ cm^-3, duration of 200-600 mcs, repetition frequency of 1-5 Hz, which is stimulated during deposition by inert gas in the form of an ion flow with energy of 150-2000 eV, which is directed perpendicular to flow of plasma foreclusters. After deposition is completed, annealing of the substrate is performed in nitrogen medium at the temperature of 150-500°C during 1-10 min. With that, a substrate from silicon with proper conductivity is used; and as metal, the metal chosen from the group containing cadmium is used; and composition from silver and nickel, and composition from silver, nickel and cadmium is used.

EFFECT: improving functional properties of material; enlarging the range of produced photo-sensitive nanomaterials.

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