TUNNEL NANOSENSOR OF MECHANICAL OSCILLATIONS AND METHOD OF ITS PRODUCTION Russian patent published in 2009 - IPC G12B21/04 B82B1/00 B82B3/00 

FIELD: nanotechnologies.

SUBSTANCE: invention relates to micro system hardware, and can be used in producing sensors based on tunnel effect to convert displacement into electric signal in monitoring data processing systems that serve to forecast, diagnose and control the effects of impact waves and acoustic oscillations exerted onto various structures, vehicles, industrial buildings and structures, as well as to control temperature, develop supersensitive mikes and medicine hardware. In compliance with this invention, the sensor cantilever electrode represents a bimorph beam made up of consecutively formed layers differing in thermal expansion factors. Note that the lower layer thermal expansion factor is lower as compared with that of the upper layer. Note also that the tunnel electrode represents a bundle of nanotubes. The proposed nanosensor incorporates thin-film heater to allow desorption of low-molecular substances, precision alignment of tunnel gap and formation of nanotubes after removal of "sacrificial" service layer.

EFFECT: increased sensitivity, vibro- and impact resistance, manufacturability and reproducibility, lower costs of manufacture.

2 cl, 3 dwg