METHOD OF MAKING MICRO-ELECTROMECHANICAL RELAYS Russian patent published in 2014 - IPC B81C1/00 

FIELD: physics.

SUBSTANCE: invention relates to microsystem engineering and can be used in making micro-electromechanical relays. The method of making micro-electromechanical relays involves successively forming on a substrate a contact plating consisting of a control electrode, two bottom switched contacts placed on two sides of the control electrode at a certain distance, a sacrificial layer, a top movable contact placed over the control electrode and bottom switched contacts and supports for suspending the top movable contact. The sacrificial layer is formed from at least three sacrificial sublayers in several steps using two positive photoresists with different viscosity; holes are formed for the bottom switched contacts and the supports for suspending the top movable contact by photolithography, and the sacrificial layer is heat treated at the final step.

EFFECT: high planarity of the sacrificial layer, which improves efficiency of the process of manufacturing micro-electromechanical relays.

5 cl, 9 dwg