INTEGRAL NANOEMECHANICAL TUNNEL SWITCH Russian patent published in 2023 - IPC H01H59/00 B82B1/00 

FIELD: micromechanical tunnel switch.

SUBSTANCE: switch contains a semi-insulating substrate 1, the base of the first fixed electrode 2, the base of the second fixed electrode 3, the base of the first electrostatic actuator 4, the base of the second electrostatic actuator 5, the anchor area of the first and second movable electrode 6, the bearing elastic suspension 11, the bearing beam 17, the first 18 , the second fixed electrode 19, the fixed electrodes of the first 20 and second 21 electrostatic actuators, their movable electrodes 23, 24, the first movable electrode 25, the second movable electrode 26, the technological layers and contact areas corresponding to the said elements, the support base for the carrier beam 27, technological carrier beam stop layer 28, U-shaped cutout 31, additional cutout 32. The first tunnel contact is formed by the first fixed electrode 18 and the first movable electrode 25; the second tunnel contact is formed by the second fixed electrode 19 and the second movable electrode 26. The elastic U-shaped suspension is functionally designed to form a self-organizing structure of the switch and is a segment of a cylindrical shell adjacent at one end to the anchor region of the movable electrode 6, and at the other end to the carrier beam 17. The first electrostatic actuator is formed by a fixed deflection electrode 20 and a movable deflection electrode 23; the second electrostatic actuator is formed by a fixed deflection electrode 21 and a movable deflection electrode 24.

EFFECT: increased energy efficiency.

2 cl, 2 dwg