INTEGRATED PRESSURE CONVERTER Russian patent published in 2019 - IPC G01L9/04 

FIELD: measuring equipment.

SUBSTANCE: invention can be used for monitoring and (or) measuring pressure of liquids and gases. Essence of the invention is that the integral pressure transducer comprises a silicon crystal of n-type conductivity with a flat working surface and a thin square membrane in the center of the crystal on the back side, on the working surface of the crystal there formed are radial strain gages of the p-type conductivity, which are connected by means of metal electrical wiring to the bridge circuit, on surface of membrane on reverse side of crystal by anisotropic etching there is formed a square rigid center, along membrane perimeter and rigid center on working side of crystal there are identical in shape and size resistive strain gauges, connected in pairs, forming four half-bridges, with possibility of selection of identical working strain gauges for adjustment of temperature outputs of output signal, on the working surface of the crystal outside the membrane area there are galvanically isolated three groups of resistances from series-connected resistors, with possibility of sampling resistance for adjustment of output signals, four series-connected thermal resistors are located at equal distance from each other along the perimeter of the working surface of the crystal.

EFFECT: enabling increase in the converter accuracy and reliability.

1 cl, 2 dwg