FLEXIBLE NANO-IMPRINTING STAMP Russian patent published in 2009 - IPC G03F7/00 

Abstract RU 2365960 C2

FIELD: instrument engineering.

SUBSTANCE: present invention concerns nano-imprinting stamp designed for imprinting the millimicron (nano) and millimeter structures. Nano-imprinting stamp 1 has a major component and a first and second imprinting component 2, 3, with lithographic pattern 7 to be imprinted in a printable substrate. In first aspect, first and the second imprinting components 2, 3 can be displaced independently in a direction practically parallel to that of imprinting of the imprinting stamp. In the second aspect, first and second imprinting components 2, 3 are loosely coupled mechanically in a direction practically parallel to that of imprinting of the imprinting stamp. The stamp limits impact of defects in the substrate printed with the lithographic pattern 7, or thereon, and defects in the stamp or thereon, and any combinations of such defects by localisation of stamp bend in the major component 5 between imprinting components 2, 3.

EFFECT: design of the flexible stamp for "НВЛ" which can limit impact of defects in the substrate.

31 cl, 7 dwg

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RU 2 365 960 C2

Authors

Nil'Sen Teodor

Kristensen Anders

Khansen Ole

Dates

2009-08-27Published

2005-09-07Filed