PLATING METHOD OF NANO-COATING AND DEVICE FOR ITS IMPLEMENTATION Russian patent published in 2009 - IPC B82B3/00 C23C14/34 

FIELD: nanotechnology.

SUBSTANCE: invention relates to plasma method and device for receiving of nano-coating, particularly films of oxides, carbides and other compounds and can be used in radio-electronic, aviation, energetics and other industries. Method consists in plasma dispersion of applied substance for substratum in vacuum chamber. On substratum there are precipitated nanoparticles, received at evaporation of target in plasma of pulse high-current discharge, lynched under action of own magnetic field. Target is formed from free-falling fine-dispersed powder, which is fed into evaporation area from tank, located outside vacuum chamber. Device consists of vacuum chamber, anode and cathode, divided by insulator, power supply, holder of substratum. Vacuum chamber is implemented as symmetric relative to vertical axis, and outside the vacuum chamber by its axis it is installed tank with fine-dispersed powder, connected to vacuum chamber by drift tube, in top part of which it is located electromagnetic valve, and in bottom - gate valve.

EFFECT: invention will provide increasing of energy of applied particles of nano-coating material and to improve adhesion of coating with substratum, to enrich component content of coating.

10 cl, 11 dwg