FIELD: chemistry.
SUBSTANCE: invention can be used in chemical and electronic industry. Trichlorosilane is produced through catalytic hydrodehalogenation of silicon tetrachloride in the presence of hydrogen. The initial mixture of hydrogen and silicon tetrachloride is brought into direct contact with at least one resistance heating element. The heating element is made from metal or an alloy of metal, chosen from tungsten, niobium and tantalum.
EFFECT: invention reduces energy loss when producing trichlorosilane, as well as preventing the need to separate fine dust of catalyst.
12 cl, 3 tbl, 4 ex
| Title | Year | Author | Number |
|---|---|---|---|
| METHOD OF PRODUCING TRICHLOROSILANE THROUGH CATALYTIC HYDROHALOGENATION OF SILICON TETRACHLORIDE | 2005 |
|
RU2371388C2 |
| METHOD FOR CATALYTIC HYDROGENATION OF SILICON TETRACHLORIDE | 2011 |
|
RU2472704C1 |
| METHOD OF PRODUCING HIGH-PURITY MONOSILANE AND SILICON TETRACHLORIDE | 2011 |
|
RU2457178C1 |
| METHOD OF PRODUCING HIGH-PURITY POLYCRYSTALLINE SILICON | 2018 |
|
RU2739312C2 |
| METHOD OF PRODUCING CHLOROSILANES FROM AMORPHOUS SILICA TO PRODUCE HIGH PURITY SILICON | 2017 |
|
RU2637690C1 |
| TRICHLOROSILANE PRODUCTION PROCESS | 2004 |
|
RU2274602C1 |
| METHOD OF PRODUCING POLYCRYSTALLINE SILICON IN CLOSED CIRCUIT | 1997 |
|
RU2122971C1 |
| PRODUCTION OF SILICON WITH THE USE OF ALUMINIUM SUBCHLORIDE | 2012 |
|
RU2519460C1 |
| METHOD OF PRODUCING HIGHER SILANES | 2007 |
|
RU2470859C2 |
| METHOD OF PRODUCING TRICHLOROSILANE AND TETRACHLOROSILANE | 2009 |
|
RU2499801C2 |
