MANUFACTURING METHOD OF PRECISION PRODUCTS FROM MOLYBDENUM AND ITS ALLOYS AND SOLUTION FOR PHOTOCHEMICAL ETCHING Russian patent published in 2009 - IPC C23F1/26 H01J1/46 

FIELD: metallurgy.

SUBSTANCE: invention relates to manufacturing of precision products from molybdenum and its alloys with specified geometrical parametres. Method includes preprocessing of surface of initial material surface in degreasing organic vehicle, following serial processing in degreasing alkaline solution and water solution of acids at temperature 50 - 60 °C and 18 - 25 °C during 30 - 40 minutes and 0.5 - 1 minutes correspondingly with following drying in air-free atmosphere, formation on surface of photoengraving mask with usage if positive photoresist with kinematic viscosity, equal to 6 - 6.5 mm²/s, herewith its bake is implemented at temperature 190 - 210°C during 40 - 50 minutes, and following etching of initial material in solution for photochemical etching at temperature 50 - 60°C up to receiving of specified geometrical parametres. Solution for photochemical etching of products from molybdenum and its alloys contains aqueous mixture of acids and special additives at following correlation of components, vol. %: nitric acid 25 - 30, orthophosphoric acid 30 - 40, acetic acid 10 - 15, fluoric ammonium 2-5, molybdenum-acid ammonium 1-3, water - the rest.

EFFECT: accuracy increase of repeatability of specified geometrical parametres and yield.

4 cl, 1 dwg, 1 tbl, 5 ex