FIELD: electrical engineering.
SUBSTANCE: micro electromechanical systems (MEMS) normally comprise, at least, one enclosed moving element, for example, 3D light modulators. Proposed invention aims at increasing accuracy and efficiency. MEMS device comprises the 1st surface and the 2nd surface displaced with respect to the 1st surface to make a casing, at least, one moving element arranged inside said casing to get in contact with the 2nd surface, and encased medium control material to act on moving element. Note here that aforesaid casing is arranged inside second casing.
EFFECT: ease of mounting.
30 cl, 5 dwg
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