MODIFICATION OF ELECTROMECHANICAL BEHAVIOR OF INSTRUMENTS Russian patent published in 2010 - IPC B81B3/00

Abstract RU 2378187 C2

FIELD: electrical engineering.

SUBSTANCE: micro electromechanical systems (MEMS) normally comprise, at least, one enclosed moving element, for example, 3D light modulators. Proposed invention aims at increasing accuracy and efficiency. MEMS device comprises the 1^st surface and the 2^nd surface displaced with respect to the 1^st surface to make a casing, at least, one moving element arranged inside said casing to get in contact with the 2^nd surface, and encased medium control material to act on moving element. Note here that aforesaid casing is arranged inside second casing.

EFFECT: ease of mounting.

30 cl, 5 dwg

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RU 2 378 187 C2

Authors

Kotkhari Manish

Chuj Klehrens

Palmatir Loren

Dates

2010-01-10—Published

2005-04-20—Filed