MANUFACTURING METHOD OF QUARTZ SENSITIVE ELEMENTS OF SENSORS Russian patent published in 2020 - IPC H03H9/205 

FIELD: electronic equipment.

SUBSTANCE: invention relates to piezoelectronics and can be used in making microelectronic devices. Essence of the invention consists in the fact that forming the topology of the electrode system on the surfaces of the unit of sensitive elements (SE) in form of a thin-film coating "chromium-gold" using a photolithography method, performing thermal stabilization and extraction of individual sensors SE by means of laser milling of sensors SE unit, wherein laser milling is performed in pulse-periodic mode by picosecond laser with average radiation power of not less than 10 W at radiation frequency of not less than 500 kHz and generation of ultrashort pulses with duration of 10–20 ps at first cutting internal process links, connecting SE to each other, and then – external, retaining SE in the frame of the plate.

EFFECT: technical result consists in improvement of yield of suitable quartz SE of sensors and quality of SE surface by using laser milling of process bridges for SE separation from quartz unit; high quality of finished articles owing to high output of suitable quartz SE of sensors, high accuracy of forming volumetric microstructures and high quality of the surface of quartz SE of sensors.

1 cl, 3 dwg