FIELD: coating production.
SUBSTANCE: method for producing a multilayer gradient wear and corrosion resistant coating and a device for its production by pulsed cathode-arc evaporation. Parts are placed in a vacuum chamber on holders and coated by pulsed cathode-arc evaporation of a composite cathode. A composite cathode with axial initiation is used, consisting of at least two parts made of materials of different composition. The first of these two parts is the main body of the cathode, and the second part is made in the form of a ring attached to the said first part. Sequential separate evaporation of each selected part of the composite cathode is carried out by modulating voltage pulses in the range of 50-300 V and duration in the range of 20-1000 μs. In one option of said device, the first part of the cathode is fixed on the cooled current lead, and the second part is fixed on the outer surface of the first part. In another option of the device, the first part of the cathode is fixed on a cooled current lead. The second part of the composite cathode is fixed at the lower end of said first part. In the third version of the device, the first part of the cathode, made in the form of a hollow cylinder, is fixed on a cooled current lead, and the second part is fixed on the inner surface of the first part along its outer edge. In the center of said ring, an igniting electrode is axially mounted in a ceramic insulator.
EFFECT: increased wear resistance and corrosion resistance of machined surfaces of parts.
8 cl, 5 dwg, 2 ex
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Authors
Dates
2023-06-07—Published
2022-10-03—Filed