SENSITIVE ELEMENT ON SURFACE ACOUSTIC WAVES FOR TEMPERATURE MEASUREMENT Russian patent published in 2016 - IPC G01K11/22 

FIELD: measuring equipment.

SUBSTANCE: invention can be used in instrument-making and machine building for temperature measurement. Sensitive element on surface acoustic waves (SAW) for temperature measurement comprises two identical delay lines with acoustic paths. Each delay line is formed by SAW structures formed on surface of a piezoelectric plate, which include an interdigital transducer (IDT) and at least one reflecting structure consisting of sections in form of a system of grooves or prongs with variable or constant period. On reverse side of piezoelectric plate relative to region of location of SAW structures of second delay line there is at least one deforming element (DE), thermal coefficient of linear expansion (TCLE) of which is different from that of piezoelectric plate, and region of piezoelectric plate, on which passes acoustic path of first delay line, does not contact with region of piezoelectric plate, at which acoustic path of second delay line passes. SAW structure of first and second delay lines can be formed on one piezoelectric plate with incomplete through-recess between acoustic paths of delay lines, or on separate piezoelectric plates. Interdigital transducers of first delay line and second delay line can be connected in parallel or separately.

EFFECT: higher device sensitivity to small temperature changes and high measurement accuracy.

4 cl, 8 dwg