BUBBLER FOR CONSTANT DELIVERY OF VAPOUR OF SOLID CHEMICAL Russian patent published in 2010 - IPC C23C16/448 

FIELD: chemistry.

SUBSTANCE: invention relates to a bubbler for providing an evaporated compound during chemical vapour phase deposition and can be used in the production of semiconductors. The composite construction of the bubbler chamber has one or more chambers joined into rows. All the chambers are essentially vertical or are at an angle of 45° to the horizontal. Inside the chamber(s) there is a solid or liquid source of compound. The ratio of the length of the chamber or the combined length of the chamber joined into a row relative the direction of the stream of the carrier gas though the chamber(s) to the average diametre, equivalent to the cross section of the chamber(s) relative the direction of the carrier gas through the chamber(s) is not less than approximately 6:1.

EFFECT: stable and constant rate of delivering an evaporated compound during vapour deposition.

19 cl, 11 dwg, 3 ex