METHOD TO SEPARATE SOLID-STATE PLATES WITH TWO-SIDED THIN-FILM COAT INTO CRYSTALS Russian patent published in 2010 - IPC B26F3/00 H01L21/00 

Abstract RU 2385218 C1

FIELD: process engineering.

SUBSTANCE: invention relates to electronics engineering and can be used to produce crystals of thermal transducers and thermometers. Proposed method comprises forming marks by diamond cutter on plate surface and separation by bending the plate. Note here that marks are formed on both sides of the plate. Marks arranged on plate side extended in separation, are formed to depth of 1.1 to 1.3 of coat thickness, while those on contracted side are formed to depth of 2.5 to 3.0 of coat thickness.

EFFECT: higher reliability and yield of ready crystals.

3 dwg

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RU 2 385 218 C1

Authors

Zhukov Jurij Nikolaevich

Dates

2010-03-27Published

2008-12-08Filed